Batch processing system
A single cycle can hold 4-8 material boxes. Combined with dedicated aluminum alloy material racks and magazine type carriers, high-throughput batch processing can be achieved in a single batch - very suitable for applications such as semiconductor packaging, LED lead frames, copper lead frames, and connector terminals.
Fully Automatic PLC Control with Flexible Operating Systems
Standard PLC control supports one-touch switching between automatic and manual modes. The Windows 10-based interface with a 7-inch touchscreen displays process parameters clearly, while an optional PC control system supports integration into automated production lines and remote monitoring, reducing dependence on manual operation.
Dual MFC Gas Flow Control for Precise Process Tuning
Two mass flow controllers (MFC) allow flexible mixing of process gases including Ar, N2, and O2. A Pirani gauge continuously monitors chamber vacuum, and a mechanical oil rotary vane pump — paired with an optional Roots pump on larger-chamber models — ensures stable, repeatable vacuum performance.
Dual Generator Options for Broader Process Coverage
A mid-frequency generator (40KHz, 0–1000W) and an RF generator (13.56MHz, 0–500W) are both available, with peak system power of 4KW and three-phase five-wire AC-380V supply. This supports surface activation, degumming, degreasing, and adhesion enhancement across diverse substrates.
Configurable Chamber Materials for Different Cleanliness Standards
Chambers are built from imported aluminum alloy as standard, with stainless steel available on request. Maximum electrode processing area reaches L450×W350mm, and chamber dimensions can be customized to match the client's workpiece size — making the equipment suitable for electronics packaging, precision hardware, medical devices, and automotive components.
Compact Build, Easy Maintenance
The unified sheet-metal housing ensures reliable sealing and a clean internal layout. Racks slide out fully for quick swapping, and routine maintenance requires no specialized tools — well suited to small-to-medium batch, multi-product production environments.
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