A large cabinet-style vacuum plasma cleaner suits an established production line, but R&D sampling, small-batch trial runs, and lab-scale process validation rarely need that much chamber volume — what matters more is a small footprint, simple operation, and the ability to switch process parameters quickly. The PM/PR-60LN and 80LN series are compact, vertical vacuum plasma cleaners built for exactly that: with a round viewport that lets you watch the plasma state inside the chamber in real time without opening the door to check progress.
The machine splits into an upper and lower section: the upper houses the vacuum chamber, viewport, and touchscreen control panel; the lower houses the vacuum pump, gas lines, and electrical control system. The chamber is aluminum alloy as standard, with stainless steel available for processes more sensitive to corrosion. Electrode layers are configurable from 1–7 (60LN) or 1–8 (80LN) depending on load size, covering both small-batch sampling and slightly larger trial-production needs.
The series offers two generator technologies. The PM models use a mid-frequency power supply (40KHz, 0–1000W) — lower cost, broadly adaptable, and suited to most standard cleaning and activation needs. The PR models use an RF power supply (13.56MHz, 0–500W), which delivers more even energy distribution and less surface damage — better suited to semiconductor, precision optics, and sensitive polymer applications where treatment consistency and minimal material damage are critical. Both technology paths share the same chamber and control platform, so customers can choose based on process requirements without relearning the structure or operating logic.
Standard equipment already covers the core components: a Pirani vacuum gauge, dual MFC mass flow controllers (Ar, N₂, O₂ optional), and a mechanical oil rotary-vane vacuum pump. For more demanding processes, an extensive options list is available — dry pump, gas-bath electrode (perforated), chamber heating, heating plate, temperature sensor, H₂ safety valve, slow-vent/slow-pump valves, chilled-water electrode, water chiller, mold-temperature controller, non-standard flanges, and ceramic fasteners — all addable to fit specific materials and processes without developing a new machine for a single custom requirement.
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