Unlike atmospheric plasma, which only treats along the nozzle's travel path, vacuum plasma cleaning places the entire workpiece inside a sealed chamber. Once the chamber is pumped down to the set vacuum level, process gas is introduced and excited into plasma, enveloping every angle, gap, and blind hole on the part's surface evenly — with no treatment dead zones. This makes it the go-to choice for geometrically complex parts and processes that demand whole-surface consistency, such as pre-wire-bond treatment, precision bonding, and pre-coating activation.
The PM-2300YX uses a cabinet-style chamber with a standard PLC full-automatic control system that switches between auto and manual modes, operated through a 10-inch touchscreen; a PC host controller is available as an option, and process recipes can be programmed and stored to reduce operator-to-operator variation. The chamber is aluminum alloy as standard (stainless steel optional), with electrode layers selectable from 1 to 8, matched by a tray of the same layer count — letting a single batch load and process multiple workpieces at once, balancing uniformity with throughput.
The vacuum system pairs a Pirani gauge for real-time chamber vacuum monitoring with two MFC mass flow controllers for precise process-gas metering; Ar, N₂, and O₂ gas lines are available as options, letting the recipe switch between cleaning, activation, or etching depending on the target result. Pumping is handled by a mechanical oil rotary-vane pump, working alongside a mid-frequency/RF plasma generator (40KHz, 0–1000W adjustable) so output power can be tuned to the workpiece material and treatment requirement without sacrificing cycle time.
With a peak power draw of 40KW on 3-phase 5-wire AC-380V supply, the PM-2300YX fits semiconductor packaging, precision electronic components, LED packaging, pre-wire-bond treatment, pre-coating preparation for optical lenses, and precision medical-device cleaning — any volume process where surface-treatment uniformity and cleanliness are non-negotiable.
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